SiC Ceramic Fork Custom Made Precision Structural Component Handle Wafers Optical Component

SiC ceramic fork custom-made precision structural component, handle wafers, optical component

Abstract of SiC ceramic fork

SiC Ceramic Fork Arm is a structural component made from advanced silicon

carbide ceramic material. It is primarily used in precision equipment requiring high rigidity, low thermal expansion coefficient, and high wear resistance. The "fork arm" shape is commonly found in high-end optical devices, semiconductor processing equipment, and automated handling systems, serving as a support, positioning, transmission, or clamping element. Compared to traditional metal materials, silicon carbide ceramic offers significant advantages in mechanical performance, thermal stability, and corrosion resistance, and has gradually become a key functional component in modern high-precision manufacturing.

Attribute table of SiC ceramic fork

Design and Manufacturing of SiC Ceramic Fork Arms

Structural Design

SiC fork arms are custom-designed according to application requirements. Common forms include "U-shaped" or "T-shaped" arms used for:

• Wafer handling

• Probe card positioning

• Optical module support

Key considerations in design include:

• Load capacity and stress distribution

• Thermal stress compensation

• Precision mounting interfaces

• Cleanroom compatibility

Processing Techniques

The manufacturing process involves several critical steps:

• Powder preparation

• Forming (dry pressing, isostatic pressing, or casting)

• Sintering (e.g., pressureless sintering, reaction bonding)

• Machining (grinding, laser drilling, EDM)

• Surface finishing (polishing, coating, laser marking)

Process Flow Diagram for Preparation of SiC Ceramic Components

Application Scenarios of SiC ceramic fork

Semiconductor Equipment

SiC ceramic fork arms are commonly used in wafer handling systems for processes such as photolithography, etching, and packaging. Advantages include:

• Non-contaminating surface

• High temperature resistance

• Excellent chemical durability

• Compatibility with Class 10–1000 cleanrooms

Used in:

• EFEM and FOUP load ports

• 6", 8", and 12" wafer transport

• Vacuum pick-and-place systems

Optical Systems & Telescopes

In high-precision optical instruments, SiC fork arms provide:

• Rigid support for mirrors and lenses

• Stable alignment under thermal variations

• Lightweight structures for dynamic positioning

They are often used in:

• Interferometers

• Space telescopes

• Laser scanning systems

Aerospace & Defense of of SiC ceramic fork

In aerospace systems, SiC fork arms are valued for

• Lightweight and stiffness under vibration

• Resistance to radiation and thermal shock

• Structural stability in low-earth orbit conditions

Typical roles include payload supports, gimbal linkages, and optical mounts.

Robotic & Automation Systems

In cleanroom automation environments, SiC fork arms are used as end-effectors or grippers, offering:

• Non-conductive, non-particle-generating surfaces

• Long service life in abrasive or corrosive environments

• Resistance to outgassing in vacuum chambers

Customization & Technical Support

As a non-standard precision component, SiC ceramic fork arms are typically customized based on user requirements. Customizable parameters include:

• Overall dimensions (length, width, thickness)

• Opening size and angle

• Surface finish and roughness

• Chamfers, holes, slots

• Wafer compatibility (6", 8", 12")

We support full-cycle services including drawing review, FEM simulation for mechanical behavior, and prototype verification to ensure performance and compatibility.

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