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1200C Atmosphere CVD Electric Muffle Furnace

Categories Electric Muffle Furnace
Brand Name: SP
Model Number: SP-1200T
Certification: CE
Place of Origin: China
MOQ: 1 set
Price: Negotiation
Payment Terms: T/T, Western Union, MoneyGram, D/P
Supply Ability: 400sets/month
Delivery Time: 10-15 working days
Packaging Details: strong plywood case
Product: CVD Tube Lab Electric Furnace
Max. Temp: 1200℃
Operation Temp.: 1100℃
Rated Power: 5KW
Furnace type: cover can be opened
Insulation material: alumina ceramic fiber board
Chamber size: 80*400mm(OD*L)
Classification: Laboratory Heating Equipments
furnace tube: quartz tube
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1200C Atmosphere CVD Electric Muffle Furnace

1200C Atmosphere CVD Lab Electric Furnace High Consistency Testing Oven


Tube Lab Eelctric Furnace Features :

High film deposition rate: RF glow technology, greatly increasing the deposition rate of the film, the deposition rate can reach 10Å / S

High area uniformity: Advanced multi-point RF feeding technology, special gas path distribution and heating technology, etc., make the film uniformity index reach 8%

High consistency: using the advanced design concept of the semiconductor industry, the deviation between the substrates of one deposition is less than 2%

High process stability: Highly stable equipment ensures continuous and stable process



Main technical parameter of SUPER CVD Tube Lab Electric Furnace:

Product name and modelSP-1200T-84 lab electric furnace
Heating tube size(OD×L)Dia80x400mm
Chamber insulation materialslight weight aluminum oxide fiber ceramic
Maximum temperature1200°C working time ( < 3 hours)
Working temperature400-1100°C (adjustable, for long time )
Temperature controlIntelligent 30 segments programmable and PID auto control
Heating rate1-15℃/min (adjustable)
Temperature accuracy±1℃
ThermocoupleK type
Heating elementresistance wire
Ultimate vacuum-0.1Mpa
Vacuum pump specifications model0.5A, pumping rate 0.5L/S, power 120W
Furnace shellDouble shell with fan cooling
Temperature display modeFour Figure Liquid Crystal Display
Working powerAC 1-phase, 110V-240V, 50Hz/60Hz
Spare functioninstalled computer communication module and RS485 communication interface,to realize the remote control.

SP-1200T CVD tube furnace standard model

ModelHeating zone (OD×L mm)Work powerVacuum pump specifications
SP-1200T-53Φ50x300 mm(2.0"x12")

AC

1-phase/3-phase

110V-400V

50Hz/60Hz.

TW-0.5A;0.5L/S;120W;110V/220V
SP-1200T-54Φ50x400 mm(2.0"x16")TW-0.5A;0.5L/S;120W;110V/220V
SP-1200T-55Φ50x500 mm(2.0"x20")TW-0.5A;0.5L/S;120W;110V/220V
SP-1200T-63Φ60x300 mm(2.5"x12")TW-0.5A;0.5L/S;120W;110V/220V
SP-1200T-64Φ60x400 mm(2.5"x16")TW-0.5A;0.5L/S;120W;110V/220V
SP-1200T-65Φ60x500 mm(2.0"x20")TW-0.5A;0.5L/S;120W;110V/220V
SP-1200T-83Φ80x300 mm(3.2"x12")TW-0.5A;0.5L/S;120W;110V/220V
SP-1200T-84Φ80x400 mm(3.2"x16")TW-0.5A;0.5L/S;120W;110V/220V
SP-1200T-104Φ100x400 mm(4.0"x16")TW-0.5A;0.5L/S;120W;110V/220V
SP-1200T-154Φ150x400 mm(6.0"x16")TW-1A;1L/S;120W;110V/220V

Delivery times :

♥ For some normal standard size furnaces and components, we have in stock; So we can send out in 2-3 days;

♥ Other customized sizes the delivery time is from 15 days to 20 days according to different products request.


Our Warranty :

One year limited warranty with lifetime support, excluding heating element and ceramic tube damaged by user.
Attention: Any damages caused by the use of corrosive and acidic gases, and any damage from wrong operate and use are not under the coverage of One Year Limited Warranty.


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