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| Categories | Lab Tube Furnace |
|---|---|
| Brand Name: | Brother Furnace |
| Model Number: | BR-PECVD |
| Certification: | CE |
| Place of Origin: | China |
| MOQ: | 1 Set |
| Price: | Negotiation |
| Payment Terms: | L/C, T/T, Western Union |
| Supply Ability: | 200 Sets per month |
| Delivery Time: | 7-21 Working days |
| Packaging Details: | Strong wooden box for global shipping |
| Max Temperature: | 1200℃ |
| Normal vacuum: | -0.1MPa |
| Max Vacuum: | Configuration molecular pump, Vacuum 7x10-4 Pa (Optional) |
| Flange: | 304 stainless steel sealing flange |
| Over-temperature protection: | automatic power-off when the temperature exceeds the allowable set value |
| Safety protection: | Automatically power off when the furnace body leaks |
| Furnace structure: | double layer steel dual cooling fan, surface temperature below 50℃ |
| Max Heating rate: | 20°C /min |
| TEMPERATURE ACCURACY: | ±1℃ |
| TEMPERATURE UNIFORMITY: | ±5℃ |
| Temperature Control: | 50 Segments programmable and auto control |
| Furnace tube: | Quartz tube |
| Application: | PECVD |
| Company Info. |
| Zhengzhou Brother Furnace Co.,Ltd |
| Verified Supplier |
| View Contact Details |
| Product List |
1200C Max. Lab PECVD Tube Furnace with Gas Delivery & Vacuum Pump
Intelligent PECVD Introduction:
PECVD system is designed to decrease reaction temperature of
traditional CVD. It installed RF induction equipment in front of
traditional CVD to ionize reacting gas, so plasma is generated.
Plasma's high activity is Reaction is accelerated due to the high
activity of plasma. So, this system is called PECVD.
This model is the newest product, it synthesized the advantages of
most tube PECVD system, and added pre-heating zone in the front of
PECVD system. Tests showed that the deposition speed is quicker,
film quality is better, holes is less, and won't crack. AISO fully
automatic intelligent control system is independently designed by
our company, it is more convenient to operate and its function is
more powerful.
Wide application range: metal film, ceramic film, composite film,
continuous growth of various films.Easy to increase function, can
expand plasma cleaning etch and other functions
Main Feature:
Standard Spares:
Optional Spares:
1200℃ PECVD Tube Furnace Standard specification:
| 1. Heating System | ||
| Max.temperature | 1200℃ (1 hour) | |
| Working temperature | ≤1100℃ | |
| Chamber size | Φ100*1650mm (Tube diamater is customizable) | |
| Chamber material | High purity alumina fiber board | |
| Thermocouple | K type | |
| Temperatureaccuracy | ±1℃ | |
| Temperature control | ● 50 programmable segments for precise control of heating rate, cooling rate and dwell time. ● Built in PID Auto-Tune function with overheating & broken thermocouple broken protection. ● PLC automatic control system by PC controller inside. ● The temperature control system, sliding system (Time and Distance) could be controlled by program. | |
| Heating length | 440mm | |
| Constant heating length | 200mm | |
| Heating element | Resistance wire | |
| Power supply | Single phase, 220V, 50Hz | |
| Rated power | 9kW | |
| 2. RF Plasma Source | ||
| RF frequency | 13.56 MHz±0.005% | |
| Output power | 500W | |
| Max reflect power | 500W | |
| RF output interface | 50 Ω, N-type, female | |
| Power stability | ±0.1% | |
| Harmonic component | ≤-50dbc | |
| Supply voltage/Frequency | Single phase AC220V 50/60HZ | |
| Whole efficiency | >=70% | |
| Power factor | >=90% | |
| Cooling method | Forced air | |
| 3. Three precision mass flowmeters control system | ||
| External dimension | 600x600x650mm | |
| Connector type | Swagelok SS joint | |
| Standard range (N2) | 0~100sccm, 0~200sccm, or customizable | |
| Accuracy | ±1.5% | |
| Linear | ±0.5～1.5% | |
| Repeatability | ±0.2% | |
| Response time | Gas property: 1～4 Sec; | |
| Pressure range | 0.1～0.5 MPa | |
| Max.pressure | 3MPa | |
| Interface | Φ6,1/4'' | |
| Display | 4 digit display | |
| Ambient temperature | 5~45 high purity gas | |
| Pressure gauge | －0.1～0.15 MPa, 0.01 MPa/unit | |
| Stop valve | Φ6 | |
| Polish SS tube | Φ6 | |
| Low vacuum system included | ||
Why Brother's 1200℃ Lab PECVD Tube Furnace?
Customers from more than 30 countries choose us
Best service, Fast response
If you're interested in our 1200C Max. Lab PECVD Tube Furnace with Gas Delivery & Vacuum Pumpe, contact us now to get a quote!
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