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Microwave plasma CVD high temperature furnace microwave heating system

Categories Muffle furnace
Brand Name: Yifei
Model Number: MWP
Place of Origin: China
MOQ: 1 set
Price: 15000-30000USD/SET
Payment Terms: T/T
Supply Ability: 1000 set/year
Delivery Time: 30 days
Packaging Details: fumigation free package
type: plasma furnace
heating source: microwave
temperature: 1500℃
power: 2-4kw
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    Microwave plasma CVD high temperature furnace microwave heating system

    Microwave plasma CVD high temperature furnace microwave heating system


    This equipment with excellent performance of high degree of ionization, high electron temperature and electron density, wide applicable pressure range, no internal electrode contamination, the microwave plasma has wide range of application in the field of material surface treatment, preparation of diamond films, chemical vapor deposition, etching and methane reforming hydrogen, long-lasting phosphorescent materials, ceramic sintering, carbon nano tube modified, nano powder synthesis and processing of water pollution.
    Vertical reactor design allows a high plasma density, symmetrical microwave generating device produce a more uniform plasma environment.

    There is no internal electrode in resonator of microwave plasma CVD furnace; it could avoid contamination generated by electrode discharge, furthermore, with wide operation pressure range, high density and large area of plasma and high stability, as there is no contact with vacuum wall, it avoid pollution to the films from vacuum wall.

    Material demandany non flammable and explosive material include metal material, ceramic, organic material, mineral, solution etc..
    Microwave frequency2.45GHz±50MHz
    Heating modesMicrowave heating
    Max power3KW(adjustable)
    Max working temperature1200℃
    Long term working temperatureLess than 1100℃
    Temperature measurementMicrowave field special temperature sensor
    Temperature control precision±2℃ by microwave field special temperature sensor
    Quartz tube sizeOD102mm/ID92mm*L1000mm
    Heating container qty0.5-3L, Optionally 2 containers
    Quartz tube sizeOD220mm/ID210mm*H360mm
    Configuration of vacuum system( for optional)

    Simple mechanical pump and stainless flange
    10-1Pa quality mechanical vacuum pump and vacuum gauge
    10-2Pa quality mechanical vacuum pump, diffusion pump and vacuum gauge
    10-3Pa quality mechanical vacuum pump, molecular pump and vacuum gauge

    Rising speed (standard)0~1000℃/min programmable and segmented control and set freely
    Temperature control systemControlled by PLC, no touch screen
    Machine size(L*W*H)1000mm*750mm*1830mm
    Microwave leakageLess than or equal to 0.4mW/cm2
    Reference spare partshigh temperature gloves 1 suit, Manual instruction 1 copy


    ModelWBMW-QXCJ4
    Material demandany non flammable and explosive material include metal material, ceramic, organic material, mineral, solution etc..
    Microwave frequency2.45GHz±50MHz
    Heating modes1 Microwave heating mode 2 Electric heating mode 3 Combination microwave and electric heating mode
    Max power4KW(adjustable)
    Temperature measurementMicrowave field special temperature sensor
    Temperature control precision±2℃by microwave field special temperature sensor
    Heating tube materialQuartz tubeHigh-temperature alloy tubeCorundum tube
    Max heating temperature of heating tube1200℃1200℃1600℃
    Tube size(OD/ID*length)45mm/35mm*1200mm, max OD 60mm
    Heating rateLess than or equal to 200℃/minNo limitLess than or equal to 50℃/min
    Length of constant temperature areaStandard length 10mm, 10mm-1000mm for optional
    Heating areaHeating several area at the same time
    Air circuit flangeStainless flange
    Mass flow controlAlicat mass flow controller, Mass flow controller cabinet,
    Air circuit qty2 or 3
    Flow rate range0-1SLM(standard L/min) Nitrogen calibration
    Accuracy±0.2% F.S
    Response timeLess than or equal to 1 second
    Work pressureInlet pressure 0.05-0.35Mpa(meter pressure), flow spec less than or equal to 10SLM
    Connection of system

    Quick links flexible tube, high vacuum manual block valve
    digital vacuum gauge

    SpecHigh vacuum
    Vacuum range of systemStandard atmosphere 10-3Pa
    Configuration of vacuum system( for optional)

    Simple mechanical pump and stainless flange
    10-1Pa quality mechanical vacuum pump and vacuum gauge
    10-2Pa quality mechanical vacuum pump, diffusion pump and vacuum gauge
    10-3Pa quality mechanical vacuum pump, molecular pump and vacuum gauge

    Furnace container size(L*W*H)700mm*350mm*´530mm
    Heating container(standard)Set according to tube size, length of heating area, and qty of heating area
    Rising speed (standard)0~1000℃/min programmable and segmented control and set freely
    Temperature control systemControlled by PLC, no touch screen
    Machine size(L*W*H)1500mm*750m*1560mm
    Microwave leakageLess than or equal to 0.4mW/cm2
    Reference spare partshigh temperature gloves 1 suit, Manual instruction 1 copy















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